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Designing small structures necessitates an understanding of various device behaviors. The way to gain that understanding is to build, analyze, and interpret the proper mathematical models. Through such models, this book illuminates microscale and nanoscale phenomena, and thereby facilitates the design and optimization of micro- and nanoscale devices. Each chapter focuses on a set of devices that share a common feature. The authors abstract that feature and present the mathematical tools needed to model it. This treatment not only provides the background and tools needed to design and optimize microdevices but also helps develop the intuitive understanding that can lead to developing new and better designs and devices.

Microelectromechanical systems --- -MEMS (Microelectromechanical systems) --- Micro-electro-mechanical systems --- Micro-machinery --- Microelectromechanical devices --- Micromachinery --- Micromachines --- Micromechanical devices --- Micromechanical systems --- Electromechanical devices --- Microtechnology --- Mechatronics --- Mathematical models --- Mathematical models. --- -Mathematical models --- MEMS (Microelectromechanical systems) --- Microelectromechanical systems. --- Systèmes microélectromécaniques --- Modèles mathématiques

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This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.

Microelectromechanical systems. --- MEMS (Microelectromechanical systems) --- Micro-electro-mechanical systems --- Micro-machinery --- Microelectromechanical devices --- Micromachinery --- Micromachines --- Micromechanical devices --- Micromechanical systems --- Electromechanical devices --- Microtechnology --- Mechatronics --- Electronics engineering

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Microelectromechanical systems. --- Silicon. --- MEMS (Microelectromechanical systems) --- Micro-electro-mechanical systems --- Micro-machinery --- Microelectromechanical devices --- Micromachinery --- Micromachines --- Micromechanical devices --- Micromechanical systems --- Electromechanical devices --- Microtechnology --- Mechatronics

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Microelectromechanical systems --- MEMS (Microelectromechanical systems) --- Micro-electro-mechanical systems --- Micro-machinery --- Microelectromechanical devices --- Micromachinery --- Micromachines --- Micromechanical devices --- Micromechanical systems --- Electromechanical devices --- Microtechnology --- Mechatronics --- Design and construction

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The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling. We are very pleased to present this book that contains 18 chapters, written by the experts in the field of MEMS. These chapters are groups into four broad sections of BioMEMS Devices, MEMS characterization and micromachining, RF and Optical MEMS, and MEMS based Actuators. The book starts with the emerging field of bioMEMS, including MEMS coil for retinal prostheses, DNA extraction by micro/bio-fluidics devices and acoustic biosensors. MEMS characterization, micromachining, macromodels, RF and Optical MEMS switches are discussed in next sections. The book concludes with the emphasis on MEMS based actuators.

Microelectromechanical systems. --- MEMS (Microelectromechanical systems) --- Micro-electro-mechanical systems --- Micro-machinery --- Microelectromechanical devices --- Micromachinery --- Micromachines --- Micromechanical devices --- Micromechanical systems --- Electromechanical devices --- Microtechnology --- Mechatronics --- Electricity, electromagnetism & magnetism